SUBSTRATE CARRIER
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United States of America Patent
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Issued Date -
Jan 11, 2018
app pub date -
Jul 7, 2017
filing date -
Jul 9, 2016
priority date (Note) -
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Abstract
Embodiments of substrate carriers and method of making the same are provided herein. In some embodiments, a substrate carrier includes a substantially planar body; and a plurality of holding elements arranged on a surface of the substantially planar body, wherein the plurality of holding elements are configured to hold a plurality of substrates on the surface of the substantially planar body, and wherein the plurality of holding elements includes at least three holding elements disposed around a corresponding position of each of the plurality of substrates.
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