Substrate liquid processing apparatus, substrate liquid processing method and storage medium
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United States of America Patent
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Oct 9, 2018
Grant Date -
Jan 11, 2018
app pub date -
Jun 28, 2017
filing date -
Jul 5, 2016
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Abstract
A substrate liquid processing apparatus includes a liquid processing unit configured to process a substrate by a processing liquid, and a controller. The controller processes the substrate in the liquid processing unit, and switches the processing liquid discharged from a discharge line, from a recycling line, to a waste line in which the processing liquid is discarded through the discharge line to the outside, according to a concentration of an elution component eluted from the substrate.
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