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Abstract

A semiconductor structure (100) comprising:

a substrate (102),a first layer (106) of AlXGaYIn(1−X−Y)N disposed on the substrate,stacks (107, 109) of several second and third layers (108, 110) alternating against each other, between the substrate and the first layer,a fourth layer (112) of AlXGaYIn(1−X−Y)N, between the stacks,a relaxation layer of AlN disposed between the fourth layer and one of the stacks,and, in each of the stacks:the level of Ga of the second layers increases from one layer to the next in a direction from the substrate to the first layer,the level of Ga of the third layers is constant or decreasing from one layer to the next in said direction, the average mesh parameter of each group of adjacent second and third layers increasing from one group to the next in said direction,the thickness of the second and third layers is less than 5 nm.

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First Claim