Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Sep 3, 2019
Grant Date -
Jan 11, 2018
app pub date -
Jul 11, 2016
filing date -
Jul 11, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
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US Family Size
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Non-US Coverage
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Abstract
A substrate processing system includes a processing chamber and a showerhead including a faceplate, a stem portion and a cylindrical base portion. A collar connects the showerhead to a top surface of the processing chamber. The collar defines a gas channel to receive secondary purge gas and a plurality of gas slits to direct the secondary purge gas from the gas channel in a radially outward and downward direction. A conical surface is arranged adjacent to the cylindrical base and around the stem portion of the showerhead. An inverted conical surface is arranged adjacent to a top surface and sidewalls of the processing chamber. The conical surface and the inverted conical surface define an angled gas channel from the plurality of gas slits to a gap defined between a radially outer portion of the cylindrical base portion and the sidewalls of the processing chamber.
First Claim
Other Claims data not available
Family
- No Family data available.
International Classification(s)
- 2016 Application Filing Year
- C23C Class
- 3247 Applications Filed
- 2111 Patents Issued To-Date
- 65.02 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 6 Citation Count
- C23C Class
- 46.23 % this patent is cited more than
- 6 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 3, 2027 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 3, 2031 |
