Adhesive for pellicle, pellicle, and method of selecting adhesive for pellicle
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United States of America Patent
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Jul 16, 2019
Grant Date -
Jan 11, 2018
app pub date -
Jun 30, 2017
filing date -
Jul 11, 2016
priority date (Note) -
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Abstract
Provided are an adhesive comprising substantially no surface modifier and leaving a less residue behind after a pellicle is separated; a pellicle; and a method of selecting an adhesive leaving a less residue behind. More specifically, provided are an adhesive for a pellicle having a ratio of a peel strength to a tensile strength of from 0.10 to 0.33; a pellicle comprising a pellicle frame, a pellicle film provided over an upper end face of the pellicle frame, and the adhesive adhered to a lower end face of the pellicle frame; and a method of selecting an adhesive, comprising the steps of: measuring a peel strength and a tensile strength of an adhesive, and selecting an adhesive having a ratio of the former to the latter of from 0.10 to 0.33 as the adhesive for a pellicle.
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