Illumination source for an inspection apparatus, inspection apparatus and inspection method

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United States of America Patent

PATENT NO 10267744
APP PUB NO 20180011029A1
SERIAL NO

15641579

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Abstract

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Disclosed is an illumination source for generating measurement radiation for an inspection apparatus. The source generates at least first measurement radiation and second measurement radiation such that the first measurement radiation and the second measurement radiation interfere to form combined measurement radiation modulated with a beat component. The illumination source may be a HHG source. Also disclosed is an inspection apparatus comprising such a source and an associated inspection method.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Nan Eindhoven, NL 53 183
Mathijssen, Simon Gijsbert Josephus Rosmalen, NL 62 443
Roobol, Sander Bas Veldhoven, NL 25 138
Tinnemans, Patricius Aloysius Jacobus Hapert, NL 112 1369

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