Refractive index measuring device
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United States of America Patent
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Jan 1, 2019
Grant Date -
Jan 11, 2018
app pub date -
Feb 10, 2016
filing date -
Feb 16, 2015
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Abstract
A photodiode includes semiconductor layers and a gate insulating layer provided on a buried insulating layer formed on a substrate and has a diffraction grating portion in which a plurality of groove portions are formed in a two-dimensional lattice shape, on the gate insulating layer. Measurement light is guided by an optical system including a photoelastic modulator and is incident on the photodiode. The measurement light is emitted from the light source device in a state of being linearly polarized light having a predetermined wavelength and is converted at a predetermined frequency by the optical system such that states in which the measurement light becomes linearly polarized light beams of two orthogonal directions are repeated. In addition, electric signals from the photodiode in the state in which the measurement light becomes the linearly polarized light beams of the two orthogonal directions are lock-in detected.
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