Vibration and shock robust gyroscope
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United States of America Patent
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Nov 13, 2018
Grant Date -
Jan 11, 2018
app pub date -
Jul 11, 2016
filing date -
Jul 11, 2016
priority date (Note) -
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Abstract
A MEMS device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to each of the rigid links. A first drive spring is coupled to the first spring head and to the movable mass, and a second drive spring is coupled to the second spring head and to the movable mass. The movable mass is resiliently suspended above the surface of the substrate via the suspension structure and the spring system. The spring system enables drive motion of the movable mass in the drive direction and sense motion of the movable mass in a sense direction perpendicular to the surface of the substrate.
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