Optical measurement element for alignment in wafer-level testing and method for aligning an optical probe using the same
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United States of America Patent
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Oct 2, 2018
Grant Date -
Jan 11, 2018
app pub date -
Jul 5, 2017
filing date -
Jul 6, 2016
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Abstract
An alignment optical measurement element includes a grating coupler, and a reflector coupled to the grating coupler. The alignment optical measurement element is arranged so that: the grating coupler diffracts an incident light in a first direction into a first diffracted light to propagate the first diffracted light as a first propagating light in a second direction, the reflector reflects the first propagating light into a second propagating light in a third direction opposite to the second direction; and the grating coupler diffracts the second propagating light into a second diffracted light to emit the second diffracted light as an emitted light in a fourth direction opposite to the first direction.
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