GROWTH CONTAINER

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United States of America Patent

SERIAL NO

15703342

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Abstract

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Relates to a method of producing a semiconductor crystal having generation of a defect suppressed in the semiconductor single crystal. The production method includes the steps of: forming a boron oxide film (31) on the inner wall of a growth container (10) having a bottom section and a body section continuous to the bottom section; bringing the boron oxide film (31) into contact with boron oxide melt containing silicon oxide to form a boron oxide film (32) containing silicon oxide on the inner wall of the growth container (10); forming raw material melt (34) above seed crystal (20) placed in and on the bottom section of the growth container (10); and solidifying the raw material melt (34) from the seed crystal (20) side to grow a semiconductor single crystal.

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO ELECTRIC INDUSTRIES LTDOSAKA CITY OSAKA OF JAPAN OSAKA-SHI OSAKA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HAGI, Yoshiaki Itami-shi, JP 11 30
KAWASE, Tomohiro Itami-shi, JP 89 1012
SAKURADA, Takashi Itami-shi, JP 45 385

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