ARC DISCHARGE GENERATION DEVICE AND FILM FORMATION METHOD
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United States of America Patent
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Issued Date -
Jan 11, 2018
app pub date -
Jun 28, 2017
filing date -
Jul 7, 2016
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Abstract
An arc discharge generation device energizes an evaporation source with the power supply device so that the evaporation source functions as a negative electrode to have a striker chip contact the evaporation source and then separate the striker chip from the evaporation source to generate an arc discharge in the chamber. When extinguishing the arc discharge generated in the chamber, the arc discharge generation device has the striker chip contact the evaporation source and de-energizes the evaporation source with the power supply device in a situation in which the striker chip is in contact with the evaporation source.
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