VAPOR DEPOSITION APPARATUS AND METHOD

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United States of America Patent

SERIAL NO

15202984

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Abstract

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A vapor deposition apparatus includes a chamber configured to operate at vacuum and at least one crucible in the chamber. The crucible is configured to receive an ingot, a feeder operable to move the ingot with respect to the at least one crucible, and a heater in the chamber and configured to heat a hot zone between the at least one crucible and the feeder. A method for vapor deposition is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
RTX CORPORATION10 FARM SPRINGS ROAD FARMINGTON CT 06032

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gero, Peter F Portland, US 17 41
Nielsen, Erik M Middletown, US 2 0

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