FILM-FORMING APPARATUS AND FILM-FORMING METHOD
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United States of America Patent
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Jan 11, 2018
app pub date -
Apr 24, 2017
filing date -
Jul 8, 2016
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Abstract
A film-forming apparatus is provided. The film-forming apparatus includes: a head connected to an evaporation source and having a plurality of opening portions; and a heater wound around the head. The heater has a first region at a side of the evaporation source and a second region at an opposite side of the first region from the evaporation source. The heater is arranged ununiformly in comparison between the first region and the second region. Furthermore, a film-forming method by using this film-forming apparatus is provided.
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