Multi-chamber deposition equipment for solid free form fabrication
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United States of America Patent
Stats
-
Aug 11, 2020
Grant Date -
Jan 11, 2018
app pub date -
Jul 8, 2016
filing date -
Jul 8, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.
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International Classification(s)
- 2016 Application Filing Year
- C23C Class
- 3247 Applications Filed
- 2111 Patents Issued To-Date
- 65.02 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- C23C Class
- 58.45 % this patent is cited more than
- 5 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 11, 2028 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 11, 2032 |
