Ion beam sputtering with ion assisted deposition for coatings on chamber components
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United States of America Patent
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Jan 31, 2023
Grant Date -
Jan 11, 2018
app pub date -
Sep 21, 2017
filing date -
Dec 6, 2013
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Abstract
An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.
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