Use of a reactive, or reducing gas as a method to increase contact lifetime in micro contact MEMS switch devices
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 7, 2021
Grant Date -
Jan 11, 2018
app pub date -
Sep 8, 2017
filing date -
Jan 27, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS device comprises an electro mechanical element in a sealed chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of the device in a manner to maximize the electrical conductivity of the surfaces during operation of the device. The MEMS device may comprise a MEMS switch having electrical contacts as the operating surfaces. The reactive gas may comprise hydrogen or an azane, optionally mixed with an inert gas, or any combination of the gases. The corresponding process provides a means to substantially reduce or eliminate contaminants present or formed on the operating surfaces of MEMS devices in a manner to maximize the electrical conductivity of the surfaces during operation of the devices.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- H01L Class
- 30754 Applications Filed
- 25260 Patents Issued To-Date
- 82.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- 4 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Mar 7, 2025 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Mar 7, 2029 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 7, 2033 |
