MICRO MULTI-ARRAY HEATER AND MICRO MULTI-ARRAY SENSOR
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Jun 27, 2017
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Jul 1, 2016
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Abstract
A micro multi-array heater and a micro multi-array sensor provided with the micro multi-array heater are provided. The micro multi-array heater includes a substrate and a heater electrode formed on the substrate. The heater electrode includes a first heater electrode having a first heat generation pattern and a second heater electrode having a second heat generation pattern. The first heat generation pattern and the second heat generation pattern are formed to have different heat generation amounts.
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