Environmentally green process and composition for cobalt wet etch

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United States of America Patent

PATENT NO 9947547
SERIAL NO

15196526

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Abstract

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An environmentally green wet etch process for selective removal of cobalt metal generally includes applying water that is free of added buffers, acids, and/or bases to a substrate including exposed cobalt metal. The process can be utilized to form recesses where desired such as may be implemented for metal contact fill, metal gate fill, interconnect fill, or the like.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Knarr, Randolph F Voorheesville, US 28 335
Mont, Frank W Troy, US 34 411
Peethala, Cornelius Brown Albany, US 68 128
Siddiqui, Shariq Albany, US 30 215

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