PROJECTION EXPOSURE DEVICE
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United States of America Patent
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app pub date -
Jan 6, 2016
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Jan 9, 2015
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Abstract
A projection exposure device projects exposure light onto a substrate via a microlens array. The projection exposure device includes a scanning exposure unit that moves the microlens array along a scanning direction from one end toward another end of the substrate, and a microlens array shift unit that moves the microlens array in a shift direction intersecting with the scanning direction during movement of the microlens array caused by the scanning exposure unit.
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