MICRO MULTI-ARRAY SENSOR
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United States of America Patent
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Jun 27, 2017
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Jul 1, 2016
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Abstract
A micro multi-array sensor includes a substrate, a sensor electrode formed on the substrate, and a heater electrode formed on the substrate. The sensor electrode includes a first sensor electrode formed on the substrate and a second sensor electrode formed on an opposite surface of the substrate from the first sensor electrode. The heater electrode is disposed more adjacent to the first sensor electrode than the second sensor electrode.
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