Thermal sensing acoustic wave resonator and acoustic wave filter having thermal sensing acoustic wave resonator
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United States of America Patent
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Jul 28, 2020
Grant Date -
Jan 4, 2018
app pub date -
Jun 27, 2017
filing date -
Jun 29, 2016
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Abstract
An acoustic wave filter having thermal sensing acoustic wave resonator comprises a substrate, a plurality of series acoustic wave resonators formed on the substrate, at least one shunt acoustic wave resonator formed on the substrate and a thermal sensing acoustic wave resonator. The thermal sensing acoustic wave resonator is one of a series acoustic wave resonator and a shunt acoustic wave resonator. Thereby the thermal sensing acoustic wave resonator plays dual roles of thermal sensing and acoustic wave filtering.
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