MEMS SENSOR WITH HIGH VOLTAGE SWITCH
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United States of America Patent
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Jun 12, 2017
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May 28, 2015
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A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).
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