MEMS DEVICE AND PROCESS
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United States of America Patent
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Jun 29, 2017
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Jun 30, 2016
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Abstract
The present application describes MEMS transducer having a membrane and a membrane electrode. The membrane and membrane electrode form a two-layer structure. The membrane electrode is in the form of a lattice of conductive material. The pitch of the lattice and/or the size of the openings varies from a central region of the membrane electrode to a region laterally outside the central region.
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