SILICA MEMBRANE FILTER
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United States of America Patent
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Sep 12, 2017
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Mar 19, 2015
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A silica membrane filter 10 includes an ultrafiltration membrane 15, which is disposed on a support body 14 and which contains an element 14 as a primary component, and a silica membrane 18 which is disposed on the ultrafiltration membrane 15 and which has an aryl group. The ultrafiltration membrane 15 has a structure infiltrated by Si of the silica membrane 18, the atomic ratio A (=Si/M) of Si to the element M in a membrane-side region 16, which is a region corresponding to 25% of the ultrafiltration membrane 15 from the silica membrane 18, satisfies 0.01≦A≦0.5, and the ratio A/B of the atomic ratio A to the atomic ratio B (=Si/M) in a base-material-side region 17, which is a region corresponding to 25% from the support body 14, is within the range of 1.1 or more.
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