LASER-DRIVEN LIGHT SOURCE DEVICE
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United States of America Patent
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Jun 16, 2017
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Jun 23, 2016
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A light source device includes a laser oscillator for emitting a continuous laser beam and a pulsed laser beam. The laser oscillator has a resonator, at least one laser medium in the resonator, a first pumping unit for supplying light to the laser medium, and a second pumping unit for supplying another light to the laser medium. The light source device also includes a plasma vessel to receive the continuous laser beam and the pulsed laser beam from the laser oscillator, generate plasma, and emit light derived from the plasma. The light source device also includes a first electricity feeder for feeding electricity to the first pumping unit, a second electricity feeder for feeding electricity to the second pumping unit, and a controller for controlling the first and second electricity feeders such that the first pumping unit generates continuous light, and the second pumping unit generates pulsed light.
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