Processing method, processing apparatus and processing program configured to determine conditions of pole figure measurement by X-ray diffraction

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United States of America Patent

PATENT NO 10876979
APP PUB NO 20170370860A1
SERIAL NO

15618433

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Abstract

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Provided are a processing method, a processing apparatus and a processing program which can perform pole figure measurement continuously without overlapping of an angle a in a pole figure with the small number of times of ϕ scan, thereby enabling the efficient measurement. The processing method for determining conditions of pole figure measurement by X-ray diffraction, includes the steps of. receiving input of a diffraction angle 2θ; and determining an angle ω formed by an incident X-ray and an x-axis, and a tilt angle χ of a sample in each ϕ scan for a rotation angle ϕ within a sample plane so as to make a range of an angle a continuous from α=90° to α=0° without overlapping, the angle α being formed by the sample plane and a scattering vector, the range of the angle α are detectable at a time on a two-dimensional detection plane in the pole figure measurement at the diffraction angle 2θ, in which determining the angle ω and the tilt angle χ is repeated.

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Patent Owner(s)

Patent OwnerAddress
RIGAKU CORPORATION3-9-12 MATSUBARA-CHO AKISHIMA-SHI TOKYO 196-8666

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  • 2017 Application Filing Year
  • G01N Class
  • 13595 Applications Filed
  • 8906 Patents Issued To-Date
  • 65.51 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Himeda, Akihiro Akishima, JP 14 59
Konaka, Hisashi Akiruno, JP 5 21
Mitsunaga, Toru Hachioji, JP 8 31
Nagao, Keigo Saitama, JP 18 605

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  • 1 Citation Count
  • G01N Class
  • 57.64 % this patent is cited more than
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