Cleaning apparatus, plating apparatus using the same, and cleaning method
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United States of America Patent
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Sep 22, 2020
Grant Date -
Dec 28, 2017
app pub date -
Jun 28, 2017
filing date -
Jun 28, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A cleaning apparatus is provided. This cleaning apparatus includes an inlet, an outlet, a first conveyance path, a second conveyance path, a cleaning unit disposed on the first conveyance path and configured to clean the target object in a non-contacting manner, and a drying unit disposed on the first conveyance path and configured to dry the target object in a non-contacting manner. The first conveyance path and the second conveyance path are vertically arranged side by side. The second conveyance path is positioned above the first conveyance path and connected with the outlet at an end point. The second conveyance path functions as a stocker configured to temporarily store the target object.
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