Patterning graphene with a hard mask coating

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United States of America Patent

PATENT NO 10903319
APP PUB NO 20170365562A1
SERIAL NO

15623279

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Abstract

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Embodiments of the disclosed technology include patterning a graphene sheet for biosensor and electronic applications using lithographic patterning techniques. More specifically, the present disclosure is directed towards the method of patterning a graphene sheet with a hard mask metal layer. The hard mask metal layer may include an inert metal, which may protect the graphene sheet from being contaminated or damaged during the patterning process.

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Patent Owner(s)

  • NANOMEDICAL DIAGNOSTICS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goldsmith, Brett San Diego, US 19 351
Pan, Deng San Diego, US 44 384

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