Device for swiveling a mirror element with two degrees of swiveling freedom

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United States of America Patent

PATENT NO 10761317
APP PUB NO 20170363861A1
SERIAL NO

15692956

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Abstract

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A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHGERMANY COHEN OBERKOCHEN BADEN-WURTTEMBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hauf, Markus Ulm, DE 64 652
Sarov, Yanko Aalen, DE 11 26

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