Method and apparatus of inspecting a substrate with a component mounted thereon
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United States of America Patent
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Jun 25, 2019
Grant Date -
Dec 21, 2017
app pub date -
Dec 16, 2015
filing date -
Dec 16, 2014
priority date (Note) -
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Abstract
A method and an apparatus of inspecting a substrate with a component mounted thereon, which are capable of inspecting whether the component is properly mounted or not without additional setting or changing inspection condition, are provided. The method comprises measuring a three-dimensional shape by irradiating the pattern image toward the substrate through at least one illumination unit and by taking a reflected image through an imaging unit, extracting a shield region from the three-dimensional shape, and inspecting a component mounting defect in an area excluding the shield region in the three-dimensional shape.
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