Mixing dimers for moisture resistant materials

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United States of America Patent

PATENT NO 10743421
APP PUB NO 20170362703A1
SERIAL NO

15627274

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Abstract

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A coating apparatus includes a first vaporizer configured to vaporize a first precursor material, a second vaporizer configured to vaporize a second precursor material in series with the first vaporizer, at least one pyrolysis chamber configured to further process vaporized precursor material from one of the first vaporizer or second vaporizer, and a deposition chamber configured to receive the processed precursor materials.

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Patent Owner(s)

Patent OwnerAddress
HZO INCDRAPER UT

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Su, Tining Draper, US 7 8
Yun, Yang Draper, US 18 75

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