Chemical mechanical polishing (CMP) of cobalt-containing substrate
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United States of America Patent
Stats
-
Aug 18, 2020
Grant Date -
Dec 21, 2017
app pub date -
Jun 6, 2017
filing date -
Jun 16, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Chemical mechanical polishing (CMP) compositions, methods and systems for polish cobalt or cobalt-containing substrates are provided. The CMP compositions comprise α-alanine, abrasive particles, a salt of phosphate, corrosion inhibitor, oxidizer and water. The cobalt chemical mechanical polishing compositions provide high removal rate of Co as well as very high selectivity of Co film vs. dielectric film, such as TEOS, SixNy (with 1.0
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
TW | B | TWI648359 | Jun 13, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
GRANTED PATENT OR PATENT OF ADDITION | CHEMICAL MECHANICAL POLISHING (CMP) OF COBALT-CONTAINING SUBSTRATE | Jan 21, 2019 | |||
SG | A | SG10201704912Y | Jun 14, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
UK PATENTS REGISTERED | CHEMICAL MECHANICAL POLISHING (CMP) OF COBALT-CONTAINING SUBSTRATE | Jan 30, 2018 | |||
EP | B1 | EP3257910 | Jun 15, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
Patent | CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION, METHOD AND SYSTEM FOR COBALT-CONTAINING SUBSTRATE | Mar 27, 2019 | |||
CN | B | CN107523219 | Jun 16, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
GRANTED PATENT FOR INVENTION | Chemical Mechanical Polishing (CMP) of cobalt-containing substrates | Dec 29, 2020 | |||
JP | B2 | JP6687563 | Jun 16, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PUBLISHED GRANTED PATENT (SECOND LEVEL) | コバルト含有基材の化学的機械的研磨(CMP) | Apr 22, 2020 | |||
KR | B1 | KR101982713 | Jun 16, 2017 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PATENT SPECIFICATION | 코발트-함유 기판의 화학적 기계적 폴리싱 | May 27, 2019 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
VERSUM MATERIALS US LLC | 8555 SOUTH RIVER PARKWAY PATENT DEPT TEMPE AS 85284 |
International Classification(s)

- 2017 Application Filing Year
- B24B Class
- 763 Applications Filed
- 552 Patents Issued To-Date
- 72.35 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Clore, Timothy Joseph | Chandler, US | 1 | 7 |
# of filed Patents : 1 Total Citations : 7 | |||
Grief, Malcolm | Phoenix, US | 27 | 731 |
# of filed Patents : 27 Total Citations : 731 | |||
O'Neill, Mark Leonard | Queen Creek, US | 111 | 11126 |
# of filed Patents : 111 Total Citations : 11126 | |||
Rose, Joseph | Chandler, US | 12 | 36 |
# of filed Patents : 12 Total Citations : 36 | |||
Schlueter, James Allen | Phoenix, US | 21 | 108 |
# of filed Patents : 21 Total Citations : 108 | |||
Shi, Xiaobo | Chandler, US | 87 | 369 |
# of filed Patents : 87 Total Citations : 369 |
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- 0 Citation Count
- B24B Class
- 0 % this patent is cited more than
- 5 Age
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