MEMS microphone and method of manufacturing the same
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United States of America Patent
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Sep 22, 2020
Grant Date -
Dec 14, 2017
app pub date -
Jun 13, 2017
filing date -
Jun 13, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A MEMS microphone includes a substrate having a cavity, a back plate disposed over the substrate to cover the cavity and having a plurality of acoustic holes, a diaphragm disposed over the substrate to cover the cavity, the diaphragm being disposed under the back plate, including a venting hole communicating with the cavity, and sensing an acoustic pressure to create a displacement, and a first insulation layer interposed between the substrate and the diaphragm to support an end portion of the diaphragm to separate the diaphragm from the substrate, and the first insulation layer having an opening formed at a position corresponding to the cavity to expose the diaphragm. Thus, since the process of forming an anchor may be omitted, the process may be simplified, and process time may be shortened.
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