Negative tone photosensitive compositions
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United States of America Patent
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Jul 14, 2020
Grant Date -
Dec 14, 2017
app pub date -
Jun 13, 2017
filing date -
Jun 14, 2016
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Abstract
Various compositions encompassing polymers containing acidic pendent groups in combination with one or more reactive olefinic compounds and a photoacid generators form self-imagable negative tone films. Examples of such polymers include polymers and copolymers containing norbornene-type repeating units having acidic pendent groups, ring opened maleic anhydride polymers, polyacrylic acid, polyhydroxystyrene polymers, and the like. The films formed from such compositions provide self imagable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices, among other applications.
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