OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL
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Jun 12, 2017
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Jun 13, 2016
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Abstract
An optical filter including at least one of a high refractive index material and a low refractive index material; wherein the optical filter exhibits a reduced angle shift in at least one of a visible, near infrared, and an extreme ultraviolet wavelength is disclosed. A method of depositing a film is also disclosed.
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