OXIDE DIELECTRIC, METHOD OF MANUFACTURING THE SAME, PRECURSOR OF OXIDE DIELECTRIC, SOLID STATE ELECTRIC DEVICE, AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Dec 24, 2014
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Dec 24, 2014
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Abstract
[Problem] Provided is an oxide dielectric having superior properties, and a solid state electronic device (for example, a high pass filter, a patch antenna, a capacitor, a semiconductor device, or a microelectromechanical system) including the oxide dielectric.
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