Systems and methods for fabricating single-crystalline diamond membranes
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United States of America Patent
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Jun 5, 2018
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app pub date -
Jun 5, 2017
filing date -
Jun 3, 2016
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Abstract
A buffer layer is employed to fabricate diamond membranes and allow reuse of diamond substrates. In this approach, diamond membranes are fabricated on the buffer layer, which in turn is disposed on a diamond substrate that is lattice-matched to the diamond membrane. The weak bonding between the buffer layer and the diamond substrate allows ready release of the fabricated diamond membrane. The released diamond membrane is transferred to another substrate to fabricate diamond devices, while the diamond substrate is reused for another fabrication.
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