Scanning probe microscope combined with a device for modifying the surface of an object
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United States of America Patent
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Aug 21, 2018
Grant Date -
Dec 7, 2017
app pub date -
Jul 10, 2015
filing date -
Jan 5, 2015
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Abstract
The microscope for monitoring objects after nano-cutting and for investigating structures of macro- and micro-carriers under low temperature comprises a punch having a cutting edge, drives driving the punch along two axes, a platform rotatable in a plane, a piezo-scanner for recording a sample image along three axes, a holder with a carrier of the sample, and a probe unit to which a probe is fastened. The piezo-scanner is fastened to the platform, the punch is able to interact with the sample, and the probe unit is mounted on the platform so as to be movable along one of the axes. The assembly includes a module for mechanical action on the cutting edge of the punch to modify the cutting surface, which module is fastened to the same platform to which the piezo-scanner with the object carrier and the probe unit are fastened.
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