Precision locating rotary stage
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United States of America Patent
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Jun 25, 2019
Grant Date -
Dec 7, 2017
app pub date -
May 31, 2017
filing date -
Jun 1, 2016
priority date (Note) -
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Abstract
A rotary stage assembly includes a platform and a rotary drive defining an axis of rotation. The platform is mounted on a spindle for receiving rotary movement from the rotary drive. A cylindrical wall is attached to the platform receiving rotary movement from the rotary drive and is coaxial with the axis of rotation defined by the rotary drive. The cylindrical wall defines an inner surface including reference patterns. An imaging assembly images the reference patterns on the inner surface of the cylindrical wall. The imaging assembly detects angular orientation and tilt of the platform from an axis of rotation of the platform from imaging the reference patterns on the inner surface of the cylindrical wall. A controller calculates angular orientation and tilt of the platform from the location of said reference patterns signaled from the imaging assembly.
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