Method for controlling a gas supply to a vacuum pump
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United States of America Patent
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Oct 20, 2020
Grant Date -
Dec 7, 2017
app pub date -
Jan 7, 2016
filing date -
Jan 15, 2015
priority date (Note) -
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Abstract
A method for regulating the temperature at an outlet channel of a compressor or a vacuum element, including providing a pressure regulating valve on a influence channel, the influence channel being in direct fluid communication with the compressor or vacuum element, the valve regulating the pressure within the compressor or vacuum element by adjusting the volume of fluid flowing between a process channel and the compressor or vacuum element relative to the difference between the pressure value within the compressor or vacuum element and a set pressure value, and includes starting the compressor or vacuum element and starting a pre-purge cycle by connecting the inlet channel to a supply of a purge gas for a preselected time interval; connecting the influence channel to a process channel; and disconnecting the inlet channel from the process channel, for maintaining a set temperature within the vacuum element for a selected time interval.
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