Method for electrochemical roughening of thin film electrodes

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United States of America Patent

PATENT NO 10612153
SERIAL NO

15615648

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Abstract

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The present invention relates to surface roughening methods and more particularly to a method for electrochemical roughening of thin film macro- and micro-electrodes. In one embodiment, an electrochemical etch template is formed comprising polymer particles adsorbed on a surface of a substrate to be roughened, followed by electrochemically etching of exposed regions of the substrate between the polymer particles in the electrochemical etch template so as to selectively roughen the surface of the substrate. In another embodiment, a surface of the electrode is immersed in either a adsorbing acidic solution, such as sulfuric acid, or a non-adsorbing acidic solution, such as perchloric acid, followed by electrochemically pulse etching the surface of the substrate at a narrow frequency range for adsorbing acidic solutions, or at a wide frequency range for non-adsorbing acidic solutions.

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LAWRENCE LIVERMORE NATIONAL SECURITY LLC2300 FIRST STREET SUITE 204 LIVERMORE CA 94550

International Classification(s)

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  • 2017 Application Filing Year
  • C25F Class
  • 74 Applications Filed
  • 55 Patents Issued To-Date
  • 74.33 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dahlquist, Dylan Folsom, US 1 0
Ivanovskaya, Anna Nikolaevna Mountain View, US 6 3
Pannu, Satinderpall S Pleasanton, US 35 287
Qian, Fang Santa Cruz, US 25 44
Shah, Kedar G San Francisco, US 26 225
Tolosa, Vanessa Oakland, US 17 154
Tooker, Angela C Dublin, US 17 114

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges2817201 - 1011 - 20024681012141618202224262830

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