Filter device to remove particles from a vapour stream
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United States of America Patent
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Mar 9, 2021
Grant Date -
Dec 7, 2017
app pub date -
Nov 27, 2015
filing date -
Dec 19, 2014
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Abstract
A filter device for reducing the amount of non-vaporous components in a vapour stream, including a carbon foam as filter material capable of being penetrated by the vapour stream and arranged in such a way that the only route for the vapour stream to pass the carbon foam is via penetration of the carbon foam. The device is in particular suitable for coating a substrate by physical vapour deposition of the vapour. The homogenous and single phase vapour stream produced by the filter device results in a smooth coated substrate wherein splashes are virtually absent.
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