Ion throughput pump and method
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United States of America Patent
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Oct 22, 2019
Grant Date -
Nov 30, 2017
app pub date -
May 31, 2016
filing date -
May 31, 2016
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Abstract
An ion throughput pump (ITP) includes a pump inlet configured to communicate with a vacuum chamber; an ionization source fluidly communicating with the vacuum chamber via the pump inlet and configured for ionizing gas species received from the vacuum chamber; a pump outlet; ion optics configured for accelerating ions produced by the ionization source toward the pump outlet; and a roughing pump stage configured for receiving the ions from the ionization source, producing neutral species from the ions, and pumping the neutral species through the pump outlet.
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