PROCESS FOR THE MANUFACTURE OF SOLAR CELLS
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Dec 3, 2015
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Dec 22, 2014
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The present invention relates to a method for manufacturing a solar cell from a silicon wafer comprising a step of etching the silicon wafer with specific gas mixtures comprising fluorine, hydrogen fluoride, one or more inert gases and optionally one or more a further gases, to silicon wafers produced using said method as well as to the use of said gas mixtures.
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