METHOD FOR MANUFACTURING METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM, METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM, AND APPARATUS FOR MANUFACTURING METAL CARBONITRIDE FILM OR METALLOID CARBONITRIDE FILM
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United States of America Patent
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Jan 4, 2016
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Jan 14, 2015
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Provided is a method capable of manufacturing a metal carbonitride film or a metalloid carbonitride film at low temperature. A metal carbonitride film or a metalloid carbonitride film is formed using as a nitrogen source at least one of an N-trialkylsilyl-1,2,3-triazole compound and a 1,2,4-triazole compound represented by the following general formula (1):
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