Constant temperature water supply system

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United States of America Patent

PATENT NO 10183370
APP PUB NO 20170341198A1
SERIAL NO

15601360

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Abstract

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A constant temperature water supply system that adjusts water from a water supply source to a constant temperature by a constant temperature water supply apparatus and supplies the water to a processing apparatus. The constant temperature water supply apparatus is provided with water temperature adjusting units that adjust processing water and cooling water to predetermined temperatures and temperature adjustment control units that reset predetermined temperatures of the water temperature adjusting units. The processing apparatus is provided with water temperature detectors that detect the water temperatures of the processing water and the cooling water and water temperature managing units that each calculate the temperature difference between the water temperature detected by the water temperature detector and a desired temperature set in advance.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsumoto, Tadaomi Tokyo, JP 6 3
Saito, Masaru Tokyo, JP 58 433

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