Coating compositions for use with an overcoated photoresist

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United States of America Patent

PATENT NO 11448964
APP PUB NO 20170336709A1
SERIAL NO

15162445

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Abstract

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Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a thermal acid generator that comprises: i) a pyridinium component having one or more ring substituents selected from optionally substituted alkyl and optionally substituted heteroalkyl; and ii) a sulfonic acid component.

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Patent Owner(s)

Patent OwnerAddress
DUPONT SPECIALTY MATERIALS KOREA LTD56 3GONGDAN 1-RO SEOBUK-GU CHEONAN-SI CHUNGCHEONGNAM-DO 31093

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kang, Ji-Hoon Chungcheongnam-Do, KR 23 59
Lee, Jung-June Chungcheongnam-Do, KR 13 20
Lim, Jae-Bong Chungcheongnam-Do, KR 34 183
Yun, Jun-Han Chungcheongnam-Do, KR 2 10

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