Coating liquid for forming piezoelectric thin film, method of producing coating liquid for forming piezoelectric thin film, piezoelectric thin film, method of manufacturing piezoelectric thin film, and liquid ejection head

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United States of America Patent

PATENT NO 10865311
APP PUB NO 20170335111A1
SERIAL NO

15493426

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Abstract

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Provided is a coating liquid for forming a piezoelectric thin film containing lead zirconate titanate, the coating liquid including a complex precursor containing at least three kinds of metal elements of Pb, Ti, and Zr, the coating liquid being free from an exothermic peak at a temperature of 450° C. or more, or having a heat generation amount at a temperature of from 400° C. to 450° C., which is larger than a heat generation amount at a temperature of from 450° C. to 500° C., in differential thermal analysis of the coating liquid.

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Patent Owner(s)

Patent OwnerAddress
CANON KABUSHIKI KAISHATOKYO
FUJI CHEMICAL CO LTD3-2-33 HIGASHINODA-CHO MIYAKOJIMA-KU OSAKA-SHI OSAKA

International Classification(s)

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  • 2017 Application Filing Year
  • C23C Class
  • 3339 Applications Filed
  • 2148 Patents Issued To-Date
  • 64.34 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Motokazu Yokohama, JP 69 234
Koketsu, Naoyuki Komae, JP 25 55
Nakasu, Minako Tokyo, JP 33 953
Shimizu, Chiemi Hirakata, JP 18 104
Uchida, Fumio Daito, JP 30 196

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  • C23C Class
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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1055695351018101 - 1011 - 2021 - 3031 - 4041 - 5051 - 600501001502002503003504004505005506006507007508008509009501000105011001150

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