SEMICONDUCTOR TREATMENT COMPOSITION AND TREATMENT METHOD

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United States of America Patent

SERIAL NO

15584155

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Abstract

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A semiconductor treatment composition includes potassium and sodium, and has a potassium content MK (ppm) and a sodium content MNa (ppm) that satisfy MK/MNa=5×103 to 1×105.

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Patent Owner(s)

Patent OwnerAddress
JSR CORPORATION1-9-2 HIGASHI-SHINBASHI MINATO-KU TOKYO 105-8640

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HAYAMA, Takahiro Minato-ku, JP 17 54
KAMEI, Yasutaka Minato-ku, JP 11 20
KAMO, Satoshi Minato-ku, JP 19 79
NISHIGUCHI, Naoki Minato-ku, JP 89 808
SHINODA, Tomotaka Minato-ku, JP 26 185

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