Method for generating a control function and method for operating a scanning unit

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10330924
APP PUB NO 20170329129A1
SERIAL NO

15594316

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method for generating a control signal is provided. The method includes the steps of decomposing a desired movement into two partial movements which are separately equalized, and the desired control signal is obtained by summing up the corrected components. The first movement is a slowly (mostly linear) changing long-period (period T1) movement, and the second movement is a short-period (period T2) movement, wherein the period T1 is substantially longer than the period T2. The movements have to a large extent opposing temporal derivations which are nevertheless equal in magnitude so that their sum has a time derivative that is zero. In addition, a method is provided for operating a scanning unit periodically displaceable in an infeed direction by an infeed distance.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBHCARL-ZEISS-PROMENADE 10 JENA 07745

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Egloff, Thomas Schwarza, DE 10 91
Engel, Joerg Weida, DE 14 76
Klemm, Frank Jena, DE 7 10
Kudryavtsev, Volodymyr Jena, DE 5 2

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 25, 2026
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 25, 2030
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00